On the Calibration and Performance of a Spreading Resistance Probe

H. Ruiz; F. Voltmer

doi:10.1520/STP47402S

SYMPOSIA PAPER Published: 01 January 1974

STP47402S

On the Calibration and Performance of a Spreading Resistance Probe

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In this paper, techniques are presented for material standards selection for calibration purposes, materials and calibration block preparation, and techniques for data collection and processing for the spreading resistance probe. A description of the variation with time of the calibration of a spreading resistance probe is presented. Problems encountered with characterization of high resistivity p-type silicon are discussed, and examples of the probe performance in the characterization of germanium are also presented.

Author Information

Ruiz, H., J.

Voltmer, F., W.

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Details

Developed by Committee: F01

Pages: 145–154

DOI: 10.1520/STP47402S

ISBN-EB: 978-0-8031-6938-8

ISBN-13: 978-0-8031-6661-5

On the Calibration and Performance of a Spreading Resistance Probe

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