A Study of the Spatial Distribution of the Oxygen Content in Silicon Wafers Using an Infrared Transmission Microscope

K Krishnan; D Kuehl

doi:10.1520/STP32663S

SYMPOSIA PAPER Published: 01 January 1984

STP32663S

A Study of the Spatial Distribution of the Oxygen Content in Silicon Wafers Using an Infrared Transmission Microscope

Source

A new high sensitivity microsampling accessory incorporating an all-reflecting microscope for use with FT-IR instruments is described. Measurements of the interstitial oxygen and substitutional carbon concentrations in silicon from sampling areas as small as 100 μm × 100 μm are described. A reflectance version of the microsampling accessory has been used for mapping the epitaxial film thickness on silicon from areas as small as 50 μm × 50 μm.

Author Information

Krishnan, K

Kuehl, D

Shipping & Handling

Domestic Shipping

Domestic orders are delivered via United Parcel Service (UPS) or United States Postal Service (USPS). Transit times average 3 to 5 business days. Please be aware that UPS will not deliver packages to Post Office Boxes.

Domestic Rush Orders

Please Contact Us.

International Standard Shipping

International orders are delivered via courier post services which can be either a postal service, courier service, or a combination of both. Standard Service is untraceable. Please allow 4-7 weeks for delivery.

International Expedited Shipping

Please Contact Us.

Please be aware that carriers will not deliver packages to Post Office Boxes. Because of the variability of customs processes and procedures in different countries, ASTM International cannot guarantee transit times to international destinations. Customs duty and taxes are the responsibility of the consignee.

Shipping & Handling charges follow the rate schedule, below:

Order Total	Shipping & Handling Fee (US Domestic)
Up to $50.00	$18.72
$50.01 to $100.00	$20.80
$100.01 to $150.00	$29.52
$150.01 to $250.00	$39.09
$250.01 to $500.00	$56.25
$500.01 to $750.00	$76.42
$750.01 to $1000.00	$93.15
$1000.01 to $1500.00	$121.27
$1500.01 to $2500.00	$158.38
$2500.01 to $4999.00	$209.04
$5000.00 to higher	FREE

Order Total	Shipping & Handling Fee (International)
Up to $50.00	$68.72
$50.01 to $100.00	$70.80
$100.01 to $150.00	$79.52
$150.01 to $250.00	$89.09
$250.01 to $500.00	$106.25
$500.01 to $750.00	$126.42
$750.01 to $1000.00	$143.15
$1000.01 to $1500.00	$171.27
$1500.01 to $2500.00	$208.38
$2500.01 to $4999.00	$259.04
$5000.00 to higher	FREE

Shipping and Handling charges are approximate. Additional charges may be incurred if your order requires multiple shipments. This does not apply to complete sets and sections.

Reprints and Permissions

Reprints and copyright permissions can be requested through the
Copyright Clearance Center

Details

Developed by Committee: F01

Pages: 325–334

DOI: 10.1520/STP32663S

ISBN-EB: 978-0-8031-4915-1

ISBN-13: 978-0-8031-0403-7

A Study of the Spatial Distribution of the Oxygen Content in Silicon Wafers Using an Infrared Transmission Microscope

Author Information

Related

Reprints and Permissions

Details