Forms of Contamination Affecting Device Processing

AC Rapa

doi:10.1520/STP32650S

SYMPOSIA PAPER Published: 01 January 1984

STP32650S

Forms of Contamination Affecting Device Processing

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Semiconductor devices are known for their sensitivity to particulate contamination during manufacture. This sensitivity is increasing as device features shrink and circuit densities increase. Current VLSI (Very Large Scale Integration) devices are also sensitive to many other forms of contamination besides particles. This paper examines the various forms of contamination and their interactions which affect the yield and performance of VLSI devices.

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Rapa, AC

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Details

Developed by Committee: F01

Pages: 163–171

DOI: 10.1520/STP32650S

ISBN-EB: 978-0-8031-4915-1

ISBN-13: 978-0-8031-0403-7

Forms of Contamination Affecting Device Processing

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