Electrical Characterization of Electrically Active Surface Contaminants by Epitaxial Encapsulation

A Derheimer; S Takamizawa; JH Matlock; H Mollenkopf

doi:10.1520/STP26054S

SYMPOSIA PAPER Published: 01 January 1989

STP26054S

Electrical Characterization of Electrically Active Surface Contaminants by Epitaxial Encapsulation

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Electrically active contaminants have been successfully detected on the surface of substrates using an epitaxial layer for encapsulation. P-type <100> wafers were deliberately contaminated with phosphorus and aluminum. The substrates were then subjected to a modified epitaxial growth cycle to preserve the contaminant on the surface High frequency C-V dopant profiles were performed, and electrically active contaminants were detected.

Author Information

Derheimer, A

Takamizawa, S

Matlock, JH

Mollenkopf, H

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Details

Developed by Committee: F01

Pages: 387–399

DOI: 10.1520/STP26054S

ISBN-EB: 978-0-8031-5107-9

ISBN-13: 978-0-8031-1273-5

Electrical Characterization of Electrically Active Surface Contaminants by Epitaxial Encapsulation

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