Particulate Cleanliness Testing of Filters and Equipment in Process Fluids

SH Goldsmith; GP Grundelman

doi:10.1520/STP26041S

SYMPOSIA PAPER Published: 01 January 1989

STP26041S

Particulate Cleanliness Testing of Filters and Equipment in Process Fluids

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Filters and equipment components used in critical semiconductor process lines must be accurately evaluated for particulate cleanliness. This requires accurate test methods, particle counting instruments, testing apparati, and careful analysis of data. This paper describes these criteria and how they can be applied.

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Goldsmith, SH

Grundelman, GP

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Developed by Committee: F01

Pages: 222–229

DOI: 10.1520/STP26041S

ISBN-EB: 978-0-8031-5107-9

ISBN-13: 978-0-8031-1273-5

Particulate Cleanliness Testing of Filters and Equipment in Process Fluids

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