On the Application of Calibration Data to Spreading Resistance Analysis

HL Berkowitz

doi:10.1520/STP26030S

SYMPOSIA PAPER Published: 01 January 1989

STP26030S

On the Application of Calibration Data to Spreading Resistance Analysis

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The requirements imposed by microelectronics structures on material characterization by spreading resistance profiling (SRP) have made the development of sound calibration procedures for SRP essential. To this end, the Efficient Multilayer Analysis Program, also known as the Berkowitz-Lux technique, has been adapted to incorporate both variable probe radius and barrier resistance models. Since both models are heuristically based, two versions of each method have been tried. Numerical stability and the ability to produce reasonable results are discussed for each version.

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Berkowitz, HL

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Details

Developed by Committee: F01

Pages: 74–86

DOI: 10.1520/STP26030S

ISBN-EB: 978-0-8031-5107-9

ISBN-13: 978-0-8031-1273-5

On the Application of Calibration Data to Spreading Resistance Analysis

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