An Automated Spreading Resistance Test Facility

James White

doi:10.1520/STP47397S

SYMPOSIA PAPER Published: 01 January 1974

STP47397S

An Automated Spreading Resistance Test Facility

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An automated spreading resistance test facility has been designed and constructed at the Allentown Works of the Western Electric Co. This system has been shown to provide a rapid, semi-nondestructive, and reproducible measurement of epitaxial layer resistivity which can be used in a production environment. The system has the advantages of operator independence, well protected probes, and four-inch capability. Surface or in-depth measurements can be performed with on-line calculations of resistivity and impurity concentration. Cycle time is less than five seconds per measurement and system reproducibility is ± 1.3% (lS).

Author Information

White, James, C.

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Details

Developed by Committee: F01

Pages: 95–98

DOI: 10.1520/STP47397S

ISBN-EB: 978-0-8031-6938-8

ISBN-13: 978-0-8031-6661-5

An Automated Spreading Resistance Test Facility

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