Electron Optical Design of Electron Probes

R. Fisher

doi:10.1520/STP45950S

SYMPOSIA PAPER Published: 01 January 1964

STP45950S

Electron Optical Design of Electron Probes

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The initial development of electron probe analysis was begun in 1949 by Castaing, who has continued to make very large contributions to the theory and practice of the method. Interest in microprobe techniques has grown considerably in the past few years, and there are now more than ten commercial models available. This paper reviews the electron optical factors important to the design and performance of an electron probe, including those that affect lens working distance, probe size and intensity, and contrast in scanning images.

Author Information

Fisher, R., M.

U. S. Steel Corp. Research Center, Monroeville, Pa.

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Details

Developed by Committee: E13

Pages: 88–127

DOI: 10.1520/STP45950S

ISBN-EB: 978-0-8031-6749-0

ISBN-13: 978-0-8031-6603-5

Electron Optical Design of Electron Probes

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