1-5 The Contribution of Sputtering to Our Knowledge of Plasma-Surface Interactions

G. Wehner

doi:10.1520/STP45157S

SYMPOSIA PAPER Published: 01 May 1967

STP45157S

1-5 The Contribution of Sputtering to Our Knowledge of Plasma-Surface Interactions

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When ions from a plasma or from an ion beam bombard a solid surface, many phenomena arise. Among those are the emission of electrons, chemical and catalytic surface reactions, lattice damage, surface migration of atoms, ion or neutralized ion scattering and reflection, ejection of neutral or excited or ionized lattice atoms (sputtering), desorption of surface layers, embedment of the bombarding ions, etc.

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Wehner, G., K.

Litton Systems, Inc.

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Developed by Committee: C24

Pages: 3–5

DOI: 10.1520/STP45157S

ISBN-EB: 978-0-8031-6028-6

ISBN-13: 978-0-8031-6182-5

1-5 The Contribution of Sputtering to Our Knowledge of Plasma-Surface Interactions

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