Sizing and Counting Airborne Particulate Contamination in Clean Rooms and Other Dust-Controlled Areas Designed for Electronic and Similar Applications

doi:10.1520/STP44480S

SYMPOSIA PAPER Published: 01 January 1963

STP44480S

Sizing and Counting Airborne Particulate Contamination in Clean Rooms and Other Dust-Controlled Areas Designed for Electronic and Similar Applications

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This Tentative Method has been approved by the sponsoring committee and accepted by the Society in accordance with established procedures, for use pending adoption as standard. Suggestions for revisions should be addressed to the Society at 1916 Race St., Philadelphia 3, Pa.

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Details

Developed by Committee: F01

Pages: 54–65

DOI: 10.1520/STP44480S

ISBN-EB: 978-0-8031-5985-3

ISBN-13: 978-0-8031-6139-9

Sizing and Counting Airborne Particulate Contamination in Clean Rooms and Other Dust-Controlled Areas Designed for Electronic and Similar Applications

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