Fused silica surfaces have been treated with continuous wave CO₂-laser radiation in an improved raster technique. Laser damage data for 1.06-μm, 9-nsec, small-spot irradiation are presented. It is shown that a reasonably sharp transition from laser damage prone to laser damage resistant surfaces takes place over a small CO₂-laser power range. The transition to high damage resistance takes place at a silica surface temperature where material flow begins to take place, as evidenced by the onset of residual strain in the CO₂-processed part. These data are taken as evidence that microcrack healing is an important mechanism in increased damage resistance in CO₂-polished parts. Also presented are data which show that CO₂-treated surfaces have a small-spot damage threshold at least as high as the bulk damage threshold of SiO₂. In addition, these treated parts show no obvious change in surface appearance, as seen in total internal reflection microscopy. They also show little change in transmissive figure. It is suggested that uniform preheating be used to eliminate the strain presently seen in CO₂-treated parts.