Depth Profiling of Hydrogen Isotopes Implanted into TiC Crystals

K Sato; S Yamaguchi; Y Fujino

doi:10.1520/STP33866S

SYMPOSIA PAPER Published: 01 January 1987

STP33866S

Depth Profiling of Hydrogen Isotopes Implanted into TiC Crystals

Source

The concentration depth profiles of hydrogen isotopes implanted into titanium carbide (TiC_x) specimens in the composition range of x = 0.50 to 0.96 have been measured using the elastic recoil detection analysis. The retention behavior of the implanted deuterium changes with the specimen composition; the deuteriums deposit near the projected range, and a saturation is eventually reached for the specimens with the composition close to stoichiometric TiC, while for the specimens with off-stoichiometric compositions they diffuse very fast away from the near surface region to the interior to attain the saturation. The experimental data of retention and isotopic replacement are compared with a simple model of local saturation and replacement.

Author Information

Sato, K

Miyagi National College of Technology, Natori 981-12, Japan

Yamaguchi, S

Institute for Materials Research, Tohoku University, Sendai 980, Japan

Fujino, Y

Tohoku University, Sendai 980, Japan

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Details

Developed by Committee: E10

Pages: 857–865

DOI: 10.1520/STP33866S

ISBN-EB: 978-0-8031-5016-4

ISBN-13: 978-0-8031-0962-9

Depth Profiling of Hydrogen Isotopes Implanted into TiC Crystals

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