Development of RF-Sputtered Laser Coatings at Burleigh Northwest

DLJ Lunt

doi:10.1520/STP28980S

SYMPOSIA PAPER Published: 01 January 1985

STP28980S

Development of RF-Sputtered Laser Coatings at Burleigh Northwest

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Complex dielectric coatings, with up to forty-three layers have been deposited using RF diode sputtering techniques. Deposition parameters have been established for ZrO₂, SiO₂ and Al₂O₃. Fabrication consistency has been high in both material properties and spectral response, and the coatings have shown useful damage, loss and environmental attributes, for laser applications, in the realms so far investigated.

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Lunt, DLJ

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Details

Developed by Committee: F01

Pages: 287–291

DOI: 10.1520/STP28980S

ISBN-EB: 978-0-8031-4956-4

ISBN-13: 978-0-8031-0930-8

Development of RF-Sputtered Laser Coatings at Burleigh Northwest

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