Computerized Yield Modeling

CH Beck

doi:10.1520/STP25779S

SYMPOSIA PAPER Published: 01 January 1987

STP25779S

Computerized Yield Modeling

Source

A computer program has been developed which extends the existing technique for calculating global circuit yield factor of lateral geometric design rules by process simulation. The current paper describes the inclusion of resistor limits as part of the general yield model. The program depends upon a reliable data base including: 1) geometric tolerances, 2) skews or offsets of critical dimensions during processing, 3) tolerable minimum separation of circuit element edges, 4) film tolerances of resistivity and thickness, and 5) resistor design limits.

The program incorporates conventional means of original design rule creation.

Author Information

Beck, CH

Shipping & Handling

Domestic Shipping

Domestic orders are delivered via United Parcel Service (UPS) or United States Postal Service (USPS). Transit times average 3 to 5 business days. Please be aware that UPS will not deliver packages to Post Office Boxes.

Domestic Rush Orders

Please Contact Us.

International Standard Shipping

International orders are delivered via courier post services which can be either a postal service, courier service, or a combination of both. Standard Service is untraceable. Please allow 4-7 weeks for delivery.

International Expedited Shipping

Please Contact Us.

Please be aware that carriers will not deliver packages to Post Office Boxes. Because of the variability of customs processes and procedures in different countries, ASTM International cannot guarantee transit times to international destinations. Customs duty and taxes are the responsibility of the consignee.

Shipping & Handling charges follow the rate schedule, below:

Order Total	Shipping & Handling Fee (US Domestic)
Up to $50.00	$18.72
$50.01 to $100.00	$20.80
$100.01 to $150.00	$29.52
$150.01 to $250.00	$39.09
$250.01 to $500.00	$56.25
$500.01 to $750.00	$76.42
$750.01 to $1000.00	$93.15
$1000.01 to $1500.00	$121.27
$1500.01 to $2500.00	$158.38
$2500.01 to $4999.00	$209.04
$5000.00 to higher	FREE

Order Total	Shipping & Handling Fee (International)
Up to $50.00	$68.72
$50.01 to $100.00	$70.80
$100.01 to $150.00	$79.52
$150.01 to $250.00	$89.09
$250.01 to $500.00	$106.25
$500.01 to $750.00	$126.42
$750.01 to $1000.00	$143.15
$1000.01 to $1500.00	$171.27
$1500.01 to $2500.00	$208.38
$2500.01 to $4999.00	$259.04
$5000.00 to higher	FREE

Shipping and Handling charges are approximate. Additional charges may be incurred if your order requires multiple shipments. This does not apply to complete sets and sections.

Reprints and Permissions

Reprints and copyright permissions can be requested through the
Copyright Clearance Center

Details

Developed by Committee: F01

Pages: 404–413

DOI: 10.1520/STP25779S

ISBN-EB: 978-0-8031-5021-8

ISBN-13: 978-0-8031-0459-4

Computerized Yield Modeling

Author Information

Related

Reprints and Permissions

Details