Effects of Deep UV Radiation on Photoresist in Al Etch

SC Lee; BL Chin

doi:10.1520/STP25755S

SYMPOSIA PAPER Published: 01 January 1987

STP25755S

Effects of Deep UV Radiation on Photoresist in Al Etch

Source

The photoresist integrity and edge profile can be improved in Al RIE etch by exposing the patterned Al coated wafers to deep UV radiation (λ =220nm). The transmitted DUV intensity on a photoresist coated clear sapphire wafer was measured as a function of the accumulated exposure time. The transmitted DUV intensity reaches a maximum after a period which is proportional to the photoresist thickness. The surface of the DUV exposed photoresist forms a highly polymerized membrane during hard bake and is stressed by the vapor pressure from inside the photoresist. The property of this membrane was studied and reasons for the improved etch integrity are proposed.

Author Information

Lee, SC

Chin, BL

Shipping & Handling

Domestic Shipping

Domestic orders are delivered via United Parcel Service (UPS) or United States Postal Service (USPS). Transit times average 3 to 5 business days. Please be aware that UPS will not deliver packages to Post Office Boxes.

Domestic Rush Orders

Please Contact Us.

International Standard Shipping

International orders are delivered via courier post services which can be either a postal service, courier service, or a combination of both. Standard Service is untraceable. Please allow 4-7 weeks for delivery.

International Expedited Shipping

Please Contact Us.

Please be aware that carriers will not deliver packages to Post Office Boxes. Because of the variability of customs processes and procedures in different countries, ASTM International cannot guarantee transit times to international destinations. Customs duty and taxes are the responsibility of the consignee.

Shipping & Handling charges follow the rate schedule, below:

Order Total	Shipping & Handling Fee (US Domestic)
Up to $50.00	$18.72
$50.01 to $100.00	$20.80
$100.01 to $150.00	$29.52
$150.01 to $250.00	$39.09
$250.01 to $500.00	$56.25
$500.01 to $750.00	$76.42
$750.01 to $1000.00	$93.15
$1000.01 to $1500.00	$121.27
$1500.01 to $2500.00	$158.38
$2500.01 to $4999.00	$209.04
$5000.00 to higher	FREE

Order Total	Shipping & Handling Fee (International)
Up to $50.00	$68.72
$50.01 to $100.00	$70.80
$100.01 to $150.00	$79.52
$150.01 to $250.00	$89.09
$250.01 to $500.00	$106.25
$500.01 to $750.00	$126.42
$750.01 to $1000.00	$143.15
$1000.01 to $1500.00	$171.27
$1500.01 to $2500.00	$208.38
$2500.01 to $4999.00	$259.04
$5000.00 to higher	FREE

Shipping and Handling charges are approximate. Additional charges may be incurred if your order requires multiple shipments. This does not apply to complete sets and sections.

Reprints and Permissions

Reprints and copyright permissions can be requested through the
Copyright Clearance Center

Details

Developed by Committee: F01

Pages: 250–256

DOI: 10.1520/STP25755S

ISBN-EB: 978-0-8031-5021-8

ISBN-13: 978-0-8031-0459-4

Effects of Deep UV Radiation on Photoresist in Al Etch

Author Information

Related

Reprints and Permissions

Details