Some Aspects of Productivity of a Low Pressure CVD Reactor

S Middleman

doi:10.1520/STP25746S

SYMPOSIA PAPER Published: 01 January 1987

STP25746S

Some Aspects of Productivity of a Low Pressure CVD Reactor

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A mathematical model of a CVD reactor is presented, from which performance criteria such as deposition uniformity, and reactor productivity, may be obtained in terms of design and operating parameters. An example is presented in which the interwafer spacing, and the number of wafers to be processed as a single batch, are determined to maximize productivity while maintaining a constraint on uniformity.

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Middleman, S

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Details

Developed by Committee: F01

Pages: 129–136

DOI: 10.1520/STP25746S

ISBN-EB: 978-0-8031-5021-8

ISBN-13: 978-0-8031-0459-4

Some Aspects of Productivity of a Low Pressure CVD Reactor

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