Oxide Optical Coatings Prepared by Metal-Organic Vapor Deposition

R Brusasco

doi:10.1520/STP24438S

SYMPOSIA PAPER Published: 01 January 1988

STP24438S

Oxide Optical Coatings Prepared by Metal-Organic Vapor Deposition

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We prepared films of alumina, zirconia and hafnia by Chemical Vapor Deposition (CVD) for evaluation as high refractive index optical components for high power laser applications. Films with high index of refraction (1.89-1.63) but with rather low single shot laser damage thresholds (4–10 J/cm^-2) were prepared by high temperature (400%C) thermal decomposition. Lower temperature deposition with chemical assist improves some optical properties and laser damage thresholds at the expense of a lower index of refraction.

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Brusasco, R

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Developed by Committee: F01

Pages: 300–307

DOI: 10.1520/STP24438S

ISBN-EB: 978-0-8031-5033-1

ISBN-13: 978-0-8031-4481-1

Oxide Optical Coatings Prepared by Metal-Organic Vapor Deposition

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