Laser-Induced Damage of Diamond Films

HE Read; M Merker; GA Gurtman; RS Wilson

doi:10.1520/STP23642S

SYMPOSIA PAPER Published: 01 January 1991

STP23642S

Laser-Induced Damage of Diamond Films

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The laser-induced damage thresholds of diamond films deposited on silicon substrates were investigated. Experiments were performed with both CW and pulsed lasers operating at a wavelength of 10.6 μm. Analytical studies were conducted to determine the thermal and thermomechanical states, as well as the electric field strengths, of the films and the substrates at the damage thresholds in an effort to identify the damage mechanism. The evidence suggests that the diamond films are damaged by stress-induced cracking which occurs when the underlying silicon approaches melt.

Author Information

Read, HE

Merker, M

Gurtman, GA

Wilson, RS

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Details

Developed by Committee: F01

Pages: 345–359

DOI: 10.1520/STP23642S

ISBN-EB: 978-0-8031-5179-6

ISBN-13: 978-0-8194-0532-6

Laser-Induced Damage of Diamond Films

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