Morphology and Laser Damage Studies by Atomic Force Microscopy of E-Beam Evaporation Deposited AR and HR Coatings

AA Tesar; M Balooch; KW Shotts; WJ Siekhaus

doi:10.1520/STP23629S

SYMPOSIA PAPER Published: 01 January 1991

STP23629S

Morphology and Laser Damage Studies by Atomic Force Microscopy of E-Beam Evaporation Deposited AR and HR Coatings

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Atomic Force Microscopy is a powerful tool for exploring the surface morphology of dielectric thin film coatings. We have demonstrated the utility of this tool in monitoring processing defects, laser conditioning and aging, and laser damage in e-beam evaporation deposited AR and HR coatings with a resolution not previously available.

Author Information

Tesar, AA

Balooch, M

Shotts, KW

Siekhaus, WJ

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Details

Developed by Committee: F01

Pages: 228–236

DOI: 10.1520/STP23629S

ISBN-EB: 978-0-8031-5179-6

ISBN-13: 978-0-8194-0532-6

Morphology and Laser Damage Studies by Atomic Force Microscopy of E-Beam Evaporation Deposited AR and HR Coatings

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