Subsurface Polishing Damage of Fused Silica: Nature and Effect on Laser Damage of Coated Surfaces

AA Tesar; NJ Brown; JR Taylor; CJ Stolz

doi:10.1520/STP23623S

SYMPOSIA PAPER Published: 01 January 1991

STP23623S

Subsurface Polishing Damage of Fused Silica: Nature and Effect on Laser Damage of Coated Surfaces

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The nature of subsurface damage incurred during polishing of fused silica varies greatly with the polishing process. Although subsurface damage is known to lower laser damage thresholds for fused silica surfaces^1,2, the effect on thresholds of coated dielectric surfaces has not been previously documented. This study describes features of subsurface damage due to polishing by ten commercial fabricators and compares laser damage thresholds of a high reflection coating on these surfaces.

Author Information

Tesar, AA

Brown, NJ

Taylor, JR

Stolz, CJ

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Details

Developed by Committee: F01

Pages: 154–172

DOI: 10.1520/STP23623S

ISBN-EB: 978-0-8031-5179-6

ISBN-13: 978-0-8194-0532-6

Subsurface Polishing Damage of Fused Silica: Nature and Effect on Laser Damage of Coated Surfaces

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