Scanning electron microscopy (SEM) was used to identify four distinct laser damage morphologies in ZnSe/ThF₄ multilayer mirrors. There were three types of defect-initiated damage morphologies. Oblong-shaped damage sites oriented perpendicular to the electric field vector of the laser were associated with particulates on or near the surface of the ZnSe/ThF₄ multilayers. Circular-shaped damage sites were initiated by particulates embedded beneath the top ZnSe layer. Selective laser damage at pinholes was identified as the third defect-initiated damage morphology. In addition to defect-initiated damage, stress-related damage was indicated by cracks near or within laser damage craters and erosion sites. Selective laser damage at nodular growth defects in SiH/SiO₂ multilayers was also observed using SEM. Samples with different numbers of nodules were prepared in-house using RF-diode, reactive sputtering. The low-defect mirror had the highest laser damage onset, and the mirror with the highest number of nodules had the lowest laser damage onset.