Crystallization of Titania Films by Thermal Heating

R Rujkorakarn; LS Hsu; CY She

doi:10.1520/STP23126S

SYMPOSIA PAPER Published: 01 January 1986

STP23126S

Crystallization of Titania Films by Thermal Heating

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Two types of low-loss, low-scatter submicron thick titania films, deposited by ion-sputtering at room temperature, were thermally annealed in air. Upon heating to about 350°C, these amorphous films show evidence of crystallization. Using a sensitive Raman spectroscopic technique, the crystalline structures are identified as anatase in one case (Type A) and rutile in the other (Type B). This amorphous-crystalline transformation coincides with a decrease in optical transmission and small changes in refractive index and energy gap of the film, along with a dramatic increase (∼100-fold) in elastic light scattering. Further heating of Type A films beyond 900°C shows a second phase transformation to anatase-rutile mixtures.

Author Information

Rujkorakarn, R

Hsu, LS

She, CY

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Details

Developed by Committee: F01

Pages: 253–261

DOI: 10.1520/STP23126S

ISBN-EB: 978-0-8031-4997-7

ISBN-13: 978-0-8031-0960-5

Crystallization of Titania Films by Thermal Heating

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