Dependence of Damage Threshold of Anti-Reflection Coatings on Substrate Surface Roughness

Y Nose; Y Kato; K Yoshida; C Yamanaka

doi:10.1520/STP18786S

SYMPOSIA PAPER Published: 01 January 1988

STP18786S

Dependence of Damage Threshold of Anti-Reflection Coatings on Substrate Surface Roughness

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Geometrical shapes of the damage sites in the 5-layer SiO₂/ZrO₂ anti-reflection (AR) coatings generated by l μm laser irradiation have been accurately determined. The damages can be classified into two types; deep damage and shallow damage, the former having the lower threshold. Dependence of the damage threshold of the deep damages on substrate surface roughness is given. It is suggested that presence of absorption centers embedded in the substrate is responsible for determining the damage threshold. Possible approaches that will lead to stronger AR coatings are proposed.

Author Information

Nose, Y

Kato, Y

Yoshida, K

Yamanaka, C

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Details

Developed by Committee: F01

Pages: 438–448

DOI: 10.1520/STP18786S

ISBN-EB: 978-0-8031-5031-7

ISBN-13: 978-0-8031-4479-8

Dependence of Damage Threshold of Anti-Reflection Coatings on Substrate Surface Roughness

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