Super-Polished Single Crystal Molybdenum Mirror for XUV ∼ X-Ray Radiation

K Yoshida; K Takeuchi; Y Kato; E Fujiwara; C Yamanaka; K Yamashita; K Kurosawa; W Sasaki; K Uehara; H Okamoto

doi:10.1520/STP18593S

SYMPOSIA PAPER Published: 01 January 1988

STP18593S

Super-Polished Single Crystal Molybdenum Mirror for XUV ∼ X-Ray Radiation

Source

High quality single crystal molybdenum (Mo) fabricated by secondary recrystallization method has been polished with a new polishing technique. The super-polished surface of the Mo single crystal has the surface roughness of 3.5Årms. THis super-polished single crystal Mo has been used for a high power electron-beam pumped argon excimer laser (λ=126nm) as a cavity mirror. Peak output power of more than 3MW has been achieved without any damage on the mirror surface for the first time.

Author Information

Yoshida, K

Takeuchi, K

Kato, Y

Fujiwara, E

Yamanaka, C

Yamashita, K

Kurosawa, K

Sasaki, W

Uehara, K

Okamoto, H

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Details

Developed by Committee: E13

Pages: 561–567

DOI: 10.1520/STP18593S

ISBN-EB: 978-0-8031-5032-4

ISBN-13: 978-0-8031-4477-4

Super-Polished Single Crystal Molybdenum Mirror for XUV ∼ X-Ray Radiation

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