Nondestructive Depth Profiling of Optically Transparent Films by Spectroscopic Ellipsometry

K Vedam; SY Kim; L D'Aries; AH Guenther

doi:10.1520/STP18579S

SYMPOSIA PAPER Published: 01 January 1988

STP18579S

Nondestructive Depth Profiling of Optically Transparent Films by Spectroscopic Ellipsometry

Source

Spectroscopic ellipsometric (SE) measurements followed by linear regression analysis of the SE data obtained on optically transparent thin films of ZnS and MgO on vitreous silica substrates, reveal the distribution of voids (or low density regions) in these thin films.

Author Information

Vedam, K

Kim, SY

D'Aries, L

Guenther, AH

Shipping & Handling

Domestic Shipping

Domestic orders are delivered via United Parcel Service (UPS) or United States Postal Service (USPS). Transit times average 3 to 5 business days. Please be aware that UPS will not deliver packages to Post Office Boxes.

Domestic Rush Orders

Please Contact Us.

International Standard Shipping

International orders are delivered via courier post services which can be either a postal service, courier service, or a combination of both. Standard Service is untraceable. Please allow 4-7 weeks for delivery.

International Expedited Shipping

Please Contact Us.

Please be aware that carriers will not deliver packages to Post Office Boxes. Because of the variability of customs processes and procedures in different countries, ASTM International cannot guarantee transit times to international destinations. Customs duty and taxes are the responsibility of the consignee.

Shipping & Handling charges follow the rate schedule, below:

Order Total	Shipping & Handling Fee (US Domestic)
Up to $50.00	$18.72
$50.01 to $100.00	$20.80
$100.01 to $150.00	$29.52
$150.01 to $250.00	$39.09
$250.01 to $500.00	$56.25
$500.01 to $750.00	$76.42
$750.01 to $1000.00	$93.15
$1000.01 to $1500.00	$121.27
$1500.01 to $2500.00	$158.38
$2500.01 to $4999.00	$209.04
$5000.00 to higher	FREE

Order Total	Shipping & Handling Fee (International)
Up to $50.00	$68.72
$50.01 to $100.00	$70.80
$100.01 to $150.00	$79.52
$150.01 to $250.00	$89.09
$250.01 to $500.00	$106.25
$500.01 to $750.00	$126.42
$750.01 to $1000.00	$143.15
$1000.01 to $1500.00	$171.27
$1500.01 to $2500.00	$208.38
$2500.01 to $4999.00	$259.04
$5000.00 to higher	FREE

Shipping and Handling charges are approximate. Additional charges may be incurred if your order requires multiple shipments. This does not apply to complete sets and sections.

Reprints and Permissions

Reprints and copyright permissions can be requested through the
Copyright Clearance Center

Details

Developed by Committee: E13

Pages: 392–396

DOI: 10.1520/STP18579S

ISBN-EB: 978-0-8031-5032-4

ISBN-13: 978-0-8031-4477-4

Nondestructive Depth Profiling of Optically Transparent Films by Spectroscopic Ellipsometry

Author Information

Related

Reprints and Permissions

Details