Canalysis of Photoconductance Decay and Surface Photovoltage Techniques: Theoretical Perspective and Experimental Evidence

A Buczkowski

doi:10.1520/STP15704S

SYMPOSIA PAPER Published: 01 January 1998

STP15704S

Canalysis of Photoconductance Decay and Surface Photovoltage Techniques: Theoretical Perspective and Experimental Evidence

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Theoretical basis of Photoconductance Decay and Surface Photovoltage Techniques is presented. Impact of typical measurement set-ups and sample preparation procedures on the differences observed in experimental results which include diffusion length, recombination lifetime, and bulk iron concentration is emphasized. Measurement accuracy and evaluation repeatability for both techniques is simulated. Relevant experimental evidence is presented based on a variety of samples with different intentionally introduced metal contamination, oxygen levels, and surface electrical properties.

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Buczkowski, A

Technology Center, Mitsubishi Silicon America, NE, Salem, OR

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Details

Developed by Committee: F01

Pages: 185–198

DOI: 10.1520/STP15704S

ISBN-EB: 978-0-8031-5389-9

ISBN-13: 978-0-8031-2489-9

Canalysis of Photoconductance Decay and Surface Photovoltage Techniques: Theoretical Perspective and Experimental Evidence

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