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Journal Published Online: 26 August 2021
Volume 10, Issue 1

Investigation of Post Annealed Titanium Nitride Thin Films Deposited with Magneto-Sputtering

CODEN: MPCACD

Abstract

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Author Information

Lathia, Rutvik
Centre for Nano Science and Engineering, Indian Institute of Science, Bangalore, India
Chauhan, Kamlesh V.
CHAMOS Matrusanstha Department of Mechanical Engineering, Chandubhai S. Patel Institute of Technology (CSPIT), Charotar University of Science and Technology (CHARUSAT), Changa, Gujarat, India
Dobariya, Kevin
CHAMOS Matrusanstha Department of Mechanical Engineering, Chandubhai S. Patel Institute of Technology (CSPIT), Charotar University of Science and Technology (CHARUSAT), Changa, Gujarat, India
Patel, Ankit
CHAMOS Matrusanstha Department of Mechanical Engineering, Chandubhai S. Patel Institute of Technology (CSPIT), Charotar University of Science and Technology (CHARUSAT), Changa, Gujarat, India
Parmar, Vishal
CHAMOS Matrusanstha Department of Mechanical Engineering, Chandubhai S. Patel Institute of Technology (CSPIT), Charotar University of Science and Technology (CHARUSAT), Changa, Gujarat, India
Pages: 16
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Details
Stock #: MPC20200213
ISSN: 2379-1365
DOI: 10.1520/MPC20200213