Journal Published Online: 02 September 2021
Volume 10, Issue 1

The Structure and Properties of Bilayer Carbon Films with Various Layer Thickness

CODEN: MPCACD

Abstract

This article studies the microstructure and mechanical properties of diamond-like carbon films (α-C), depending on their architecture. The bilayer (titanium/a-C) and (titanium nitride [TiN]/a-C) films were deposited from the flows of the metal plasma, formed through sputtering a titanium cathode by a direct current arc, and the carbon plasma, formed as a result of pulsed arc sputtering of a graphite cathode. The effect of titanium and TiN sublayers on the structure and mechanical properties of carbon films has been shown. It has been found that the catalytic effect of the sublayer is most pronounced when the carbon layer thickness is less than 90 nm; when the carbon layer thickness is less than 30 nm, the size of Csp2 clusters decreases, and the fraction of atoms with Csp3 bonds increases. The annealing of the films does not significantly affect the behavior of the phase composition and the structure of the films with an increase in the carbon layer thickness. It has been demonstrated that the size dependences of the optical properties, which are manifested in a transparency increase and a change in the band gap when increasing the carbon layer thickness, are associated with the occurrence of mutual diffusion processes in the interfacial zone.

Author Information

Liu, Yuwei
International Chinese-Belorussian Scientific Laboratory on Vacuum-Plasma Technology, Nanjing University of Science and Technology, Nanjing, China
Rogachev, A. V.
Francisk Skorina Gomel State University, Gomel, Belarus
Jiang, Xiaohong
International Chinese-Belorussian Scientific Laboratory on Vacuum-Plasma Technology, Nanjing University of Science and Technology, Nanjing, China
Zhou, Bing
Institute of New Carbon Materials, Taiyuan University of Technology, Taiyuan, China
Kulesh, E. A.
Francisk Skorina Gomel State University, Gomel, Belarus
Piliptsou, D. G.
Francisk Skorina Gomel State University, Gomel, Belarus
Rudenkov, A. S.
Francisk Skorina Gomel State University, Gomel, Belarus
Pages: 9
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Stock #: MPC20200064
ISSN: 2379-1365
DOI: 10.1520/MPC20200064