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Journal Published Online: 30 May 2018
Volume 7, Issue 4

An Experimental Study of Residual Stress Induced Modulation of Vibration Characteristics in 1-D MEMS Resonators

CODEN: MPCACD

Abstract

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Author Information

Behera, A. R.
Centre for Nano Science and Engineering, Indian Institute of Science, Bangalore, India
Dangi, A.
Department of Mechanical Engineering, Indian Institute of Science, Bangalore, India
Pratap, R.
Department of Mechanical Engineering, Indian Institute of Science, Bangalore, India Centre for Nano Science and Engineering, Indian Institute of Science, Bangalore, India
Pages: 16
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Stock #: MPC20170156
ISSN: 2379-1365
DOI: 10.1520/MPC20170156