MANUAL Published: 28 January 2015
MNL332013000206

Chapter 6 | Hydrolysis of Chlorosilanes

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A. PURPOSE The purpose of this procedure is to provide general guidelines concerning methods for hydrolyzing chlorosilane after the initial mitigation procedure.

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Developed by Committee: F20
Pages: 30–32
DOI: 10.1520/MNL332013000206
ISBN-EB: 978-0-8031-7049-0
ISBN-13: 978-0-8031-7048-3