Cart
Cart
ASTM Logo
Journal Published Online: 22 September 2023
Volume 52, Issue 1

Research on the Effect of Density on the Outgassing Characteristics of Ceramics

CODEN: JTEVAB

Abstract

<

Author Information

Luo, Yan
Institute of Microelectronics of the Chinese Academy of Sciences, Beijing, China
Wang, Kuibo
Institute of Microelectronics of the Chinese Academy of Sciences, Beijing, China
Wu, Xiaobin
Institute of Microelectronics of the Chinese Academy of Sciences, Beijing, China
Pages: 11
Price: $25.00
Related

ASTM License Agreement

Reprints and Permissions
Reprints and copyright permissions can be requested through the
Copyright Clearance Center
Details
Stock #: JTE20230335
ISSN: 0090-3973
DOI: 10.1520/JTE20230335