Journal Published Online: 18 October 2013
Volume 42, Issue 1

Sputtering Process Assessment of ITO Film for Multiple Quality Characteristics With One-Sided and Two-Sided Specifications

CODEN: JTEVAB

Abstract

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Author Information

Chang, Tsang-Chuan
Dept. of Industrial Management, National Taiwan Univ. of Science and Technology, Taipei, TW
Wang, Kung-Jeng
Dept. of Industrial Management, National Taiwan Univ. of Science and Technology, Taipei, TW
Chen, Kuen-Suan
Dept. of Industrial Engineering and Management, National Chin-Yi Univ. of Technology, Taichung, TW
Pages: 9
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Stock #: JTE20130054
ISSN: 0090-3973
DOI: 10.1520/JTE20130054