Journal
Published Online: 03 December 2009
Volume 38, Issue 2
Capability Testing Based on Subsamples: A Case on Photolithography Process Control in Wafer Fabrication
CODEN: JTEVAB
Abstract
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Author Information
Liao, Mou-Yuan
Dept. of Finance, Yuanpei Univ., HsinChu, Taiwan, Republic of China
Kang, He-Yau
Dept. of Industrial Engineering and Management, National Chin-Yi Univ. of Technology, Taiping City, Taichung Country 411 Taiwan, Republic of China
Lee, Amy
Dept. of Industrial Management, Chung Hua Univ., Hsinchu, Taiwan, Republic of China
Wu, Chien-Wei
Dept. of Industrial Engineering and Systems Management, Feng Chia Univ., Seatwen, Taichung, Taiwan, Republic of China
Pages: 10
Price: $25.00
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Details
Stock #: JTE102388
ISSN: 0090-3973
DOI: 10.1520/JTE102388