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Journal Published Online: 31 January 2005
Volume 2, Issue 2

Ultrathin Films to Modify Mechanical and Tribological Behavior of MEMS Components

CODEN: JAIOAD

Abstract

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Author Information

Rymuza, Z
Warsaw University of Technology, Warsaw, Poland
Pages: 16
Price: $25.00
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Stock #: JAI12963
ISSN: 1546-962X
DOI: 10.1520/JAI12963