Journal
Published Online: 01 June 2005
Volume 2, Issue 6
A Preliminary Mathematical Removal-Rate Model for Si CMP
CODEN: JAIOAD
Abstract
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Author Information
Estragnat, E
Ecole Centrale de Lyon, France
Martin, JM
Ecole Centrale de Lyon, France
Ng, D
Texas A&M University
Kulkarni, M
Texas A&M University
Liang, H
Texas A&M University
Texas A&M University, College Station, TX
Pages: 11
Price: $25.00
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Details
Stock #: JAI12895
ISSN: 1546-962X
DOI: 10.1520/JAI12895