Understanding Polymeric Pads in Pre-CMP Conditioning

Journal Published Online: 02 May 2005

Volume 2, Issue 5

CODEN: JAIOAD

Abstract

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Ng, D

Texas A&M University

Kulkarni, M

Texas A&M University

Xu, G

University of Alaska Fairbanks

Severs, P

University of Alaska Fairbanks

Marvin, R

University of Alaska Fairbanks

Xiao, J

Center for Tribology

Liang, H

Texas A&M University Texas A&M University, College Station, TX

Pages: 11

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Stock #: JAI12894

ISSN: 1546-962X

DOI: 10.1520/JAI12894