Standard Specification for Chromium Sputtering Targets for Thin Film Applications
Standard Specification for Chromium Sputtering Targets for Thin Film ApplicationsF1367-98R03ASTM|F1367-98R03|en-USStandard Specification for Chromium Sputtering Targets for Thin Film ApplicationsStandardF1367 Standard Specification for Chromium Sputtering Targets for Thin Film Applications>newBOS Vol. 10.04 Committee F01
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Abstract
This specification covers sputtering targets fabricated from chromium metal for use in thin film applications. The grades of chromium covered in this specification, are based on the total metallic impurity content of the metallic elements, and are classified as 4N, 3N7, 3N5, 3N, and 2N8. Materials shall be tested using analytical methods such as combustion/infrared spectrometry, thermal conductivity, atomic absorption spectrometry, direct current plasma, inductively coupled plasma, and spark source mass spectroscopy or glow discharge mass spectroscopy; and the individual grades shall conform to specified values of chemical composition, density, grain size.
Scope
1.1 This specification covers sputtering targets fabricated from chromium metal.
1.2 This specification sets purity grade levels, physical attributes, analytical methods and packaging requirements.
1.3 The values stated in SI units are regarded as standard.
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Shipping & Handling charges follow the rate schedule, below:
Order Total
Shipping & Handling Fee (US Domestic)
Up to $50.00
$18.72
$50.01 to $100.00
$20.80
$100.01 to $150.00
$29.52
$150.01 to $250.00
$39.09
$250.01 to $500.00
$56.25
$500.01 to $750.00
$76.42
$750.01 to $1000.00
$93.15
$1000.01 to $1500.00
$121.27
$1500.01 to $2500.00
$158.38
$2500.01 to $4999.00
$209.04
$5000.00 to higher
FREE
Order Total
Shipping & Handling Fee (International)
Up to $50.00
$68.72
$50.01 to $100.00
$70.80
$100.01 to $150.00
$79.52
$150.01 to $250.00
$89.09
$250.01 to $500.00
$106.25
$500.01 to $750.00
$126.42
$750.01 to $1000.00
$143.15
$1000.01 to $1500.00
$171.27
$1500.01 to $2500.00
$208.38
$2500.01 to $4999.00
$259.04
$5000.00 to higher
FREE
Shipping and Handling charges are approximate. Additional charges may be incurred if your order requires multiple shipments. This does not apply to complete sets and sections.
