Standard Specification for Chromium Sputtering Targets for Thin Film Applications

Standard Specification for Chromium Sputtering Targets for Thin Film Applications F1367-98 ASTM|F1367-98|en-US Standard Specification for Chromium Sputtering Targets for Thin Film Applications Standard F1367 Standard Specification for Chromium Sputtering Targets for Thin Film Applications> new BOS Vol. 10.04 Committee F01

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Scope

1.1 This specification covers sputtering targets fabricated from chromium metal.

1.2 This specification sets purity grade levels, physical attributes, analytical methods and packaging requirements.

1.3 The values stated in SI units are regarded as standard.

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Details

Book of Standards Volume: 10.04

Developed by Subcommittee: F01.17

Pages: 2

DOI: 10.1520/F1367-98

ICS Code: 25.220.40

Standard Specification for Chromium Sputtering Targets for Thin Film Applications

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