Standard Historical Last Updated: Mar 02, 2021 Track Document
ASTM F1367-98

Standard Specification for Chromium Sputtering Targets for Thin Film Applications

Standard Specification for Chromium Sputtering Targets for Thin Film Applications F1367-98 ASTM|F1367-98|en-US Standard Specification for Chromium Sputtering Targets for Thin Film Applications Standard new BOS Vol. 10.04 Committee F01
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Scope

1.1 This specification covers sputtering targets fabricated from chromium metal.

1.2 This specification sets purity grade levels, physical attributes, analytical methods and packaging requirements.

1.3 The values stated in SI units are regarded as standard.

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Details
Book of Standards Volume: 10.04
Developed by Subcommittee: F01.17
Pages: 2
DOI: 10.1520/F1367-98
ICS Code: 25.220.40