Standard Specification for Refractory Silicide Sputtering Targets for Microelectronic Applications
Standard Specification for Refractory Silicide Sputtering Targets for Microelectronic ApplicationsF1238-95R99ASTM|F1238-95R99|en-USStandard Specification for Refractory Silicide Sputtering Targets for Microelectronic ApplicationsStandardF1238 Standard Specification for Refractory Silicide Sputtering Targets for Microelectronic Applications>newBOS Vol. 10.04 Committee F01
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1.1 This specification covers sputtering targets fabricated from metallic silicides (molybdenum silicide, tantalum silicide, titanium silicide, and tungsten silicide). These targets are referred to as refractory silicide targets, and are intended for use in microelectronic applications.
1.2 The values stated in SI units are regarded as standard.
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Order Total
Shipping & Handling Fee (US Domestic)
Up to $50.00
$18.72
$50.01 to $100.00
$20.80
$100.01 to $150.00
$29.52
$150.01 to $250.00
$39.09
$250.01 to $500.00
$56.25
$500.01 to $750.00
$76.42
$750.01 to $1000.00
$93.15
$1000.01 to $1500.00
$121.27
$1500.01 to $2500.00
$158.38
$2500.01 to $4999.00
$209.04
$5000.00 to higher
FREE
Order Total
Shipping & Handling Fee (International)
Up to $50.00
$68.72
$50.01 to $100.00
$70.80
$100.01 to $150.00
$79.52
$150.01 to $250.00
$89.09
$250.01 to $500.00
$106.25
$500.01 to $750.00
$126.42
$750.01 to $1000.00
$143.15
$1000.01 to $1500.00
$171.27
$1500.01 to $2500.00
$208.38
$2500.01 to $4999.00
$259.04
$5000.00 to higher
FREE
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