Standard Historical Last Updated: Aug 16, 2017 Track Document
ASTM F1152-93(2001)

Standard Test Method for Dimensions of Notches on Silicon Wafers

Standard Test Method for Dimensions of Notches on Silicon Wafers F1152-93R01 ASTM|F1152-93R01|en-US Standard Test Method for Dimensions of Notches on Silicon Wafers Standard new BOS Vol. 10.04 Committee F01
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Scope

1.1 This test method covers a nondestructive procedure to determine whether or not the dimensions of fiducial notches on silicon wafers fall within specified limits.

1.2 The values stated in SI units are to be regarded as the standard. The values given in parentheses are for information only.

1.3 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

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Details
Book of Standards Volume: 10.04
Developed by Subcommittee: F01.06
Pages: 3
DOI: 10.1520/F1152-93R01
ICS Code: 29.045