Standard Test Methods for Microbiological Monitoring of Water Used for Processing Electron and Microelectronic Devices by Direct Pressure Tap Sampling Valve and by the Presterilized Plastic Bag Method (Withdrawn 2023)

5.1 These test methods provide a field technique for the bacteriological analysis of electronic process waters. The sampling of these waters and subsequent bacteriological analysis may be critical to electronic product yields. Bacteria can be the prime source of harmful contamination which can significantly reduce the yield of satisfactory microelectronic device production.

5.2 The test methods described here may be used both to monitor the bacteriological quality of water used in microelectronic product processing, and to locate the source of bacterial contamination in a water purification system.

5.3 These test methods are simple field methods, combining sampling and bacteriological analysis techniques that do not require bacteriological laboratory facilities.

5.4 The test methods described employ culture techniques for bacteriological analysis. The user should be aware that such techniques cannot provide a complete count of the total viable bacteria present, since clumps and clusters of bacteria will appear as one single colony when cultured, and since some viable bacteria will not grow under the test conditions used. However, a meaningful comparative bacteria count will be achieved by this method if the culturing of the sample is always done at the same temperature, and for the same period of time. The temperature of incubation should always be at 28 ± 2°C, and the period of incubation should be 48 h (or 72 h if time permits). The period of incubation and temperature should be the same for all comparative studies.