Standard Historical Last Updated: Mar 02, 2021 Track Document
ASTM F816-83(1998)e1

Standard Test Method for Combined Fine and Gross Leaks for Large Hybrid Microcircuit Packages

Standard Test Method for Combined Fine and Gross Leaks for Large Hybrid Microcircuit Packages F0816-83R98E01 ASTM|F0816-83R98E01|en-US Standard Test Method for Combined Fine and Gross Leaks for Large Hybrid Microcircuit Packages Standard new BOS Vol. 10.04 Committee F01
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Scope

1.1 This test method applies to hermetic package leak testing to detect leaks of a broad spectrum in size with a minimum detection level equal to the sensitivity of the helium mass spectrometer equipment used in the test.

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Details
Book of Standards Volume: 10.04
Developed by Subcommittee: F01.03
Pages: 4
DOI: 10.1520/F0816-83R98E01
ICS Code: 31.020