Standard Practice for Scanning Electron Microscope Beam Size Characterization

1.1 This practice provides a reproducible means by which the performance of a scanning electron microscope (SEM) may be characterized. This performance is a measure of the SEM-operator-material combination and is quantified through the measurement of an effective "apparent edge sharpness" for a number of materials, two of which are suggested. This practice requires an SEM with the capability to perform line-scan traces (for example, -deflection waveform generation) for the suggested materials. The range of SEM magnification at which this practice is of utility is from 1000 to 200 000 X.

1.2 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.