Standard Practice for Checking the Operating Characteristics of X-Ray Photoelectron Spectrometers

1.1 This practice covers a procedure for checking some of the operating characteristics of an X-ray photoelectron spectrometer. Tests herein provide checks of the following instrument characteristics: X-ray photoelectron spectroscopy (XPS) signal intensity, background, energy resolution, short-term voltage stability, transmission, and energy scale linearity. It is meant for spectrometers with digital storage of counts in energy channels.

1.2 Limitations -This practice is meant to augment, and not to replace, the calibration procedures recommended by the manufacturer of the spectrometer. This practice is also not meant to be used as a means of comparison between X-ray photoelectron spectrometers, but only as a self-consistent check of the operating characteristics of an individual spectrometer.

1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.