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Standard Withdrawn, No replacement Last Updated: Jan 16, 2012 Track Document

ASTM E673-03

Standard Terminology Relating to Surface Analysis (Withdrawn 2012)

Standard Terminology Relating to Surface Analysis (Withdrawn 2012) E0673-03 ASTM|E0673-03|en-US Standard Terminology Relating to Surface Analysis (Withdrawn 2012) Standard E673 Standard Terminology Relating to Surface Analysis (Withdrawn 2012)> new BOS Vol. 03.06 Committee E42

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Scope

1.1 This terminology is related to the various disciplines involved in surface analysis.

1.2 The definitions listed apply to (a) Auger electron spectroscopy (AES), (b) X-ray photoelectron spectroscopy (XPS), (c) ion-scattering spectroscopy (ISS), (d) secondary ion mass spectrometry (SIMS), and (e) energetic ion analysis (EIA).

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Standard Terminology Relating to Surface Analysis (Withdrawn 2012)

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