Standard Terminology Relating to Surface Analysis

Standard Terminology Relating to Surface Analysis E0673-02A ASTM|E0673-02A|en-US Standard Terminology Relating to Surface Analysis Standard E673 Standard Terminology Relating to Surface Analysis> new BOS Vol. 03.06 Committee E42

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Scope

1.1 This terminology is related to the various disciplines involved in surface analysis.

1.2 The definitions listed apply to (a) Auger electron spectroscopy (AES), (b) X-ray photoelectron spectroscopy (XPS), (c) ion-scattering spectroscopy (ISS), (d) secondary ion mass spectrometry (SIMS), and (e) energetic ion analysis (EIA).

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Details

Book of Standards Volume: 03.06

Developed by Subcommittee: E42.02

Pages: 10

DOI: 10.1520/E0673-02A

ICS Code: 01.040.17; 17.040.20

Standard Terminology Relating to Surface Analysis

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